Agilent IDP-3 Dry Scroll Vacuum Pump (2.1cfm)

The Agilent IDP-3 scroll dry pump is an innovative, compact, high-performance, oil-free vacuum pump that is suitable for a wide variety of applications. It is the smallest scroll pump made for general vacuum applications, which makes it easy to integrate it into OEM systems, and it weighs only 21 pounds (9.5 kg). Yet with a pumping speed of 60 liters/min (2.1 cfm) and a very low base pressure of 250 millitorr, it is the highest-performing dry pump in its class.

This IDP-3 scroll pump is provided with an exhaust valve to prevent rapid leak-up to atmosphere when turned off. However, any vacuum pump generates a small increase in inlet line pressure when turned off. A small amount of pump debris can be carried back into a vacuum line or chamber when the pump is turned off.

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